Takumi Abe

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:15 PM - 6:00 PM 304 (304)

Symposium (Oral)
| Symposium
| Highly reliable metallization technology for long term retention

[15p-304-1~10] Highly reliable metallization technology for long term retention

5:45 PM - 6:00 PM

[15p-304-10] Low temperature deposition of nanocarbon on copper by 2-zone CVD

〇Takumi Abe¹, hayato Sasauchi¹, Kazuyoshi Ueno^1,2 (1.Shibaura Univ., 2.Shibaura Green Inno.)