TRUYEN XUAN NGUYEN

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:15 PM - 5:45 PM 315 (315)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[15p-315-1~17] 13.8 Compound and power electron devices and process technology

2:45 PM - 3:00 PM

[15p-315-7] Interface properties of SiO₂/GaN formed by Remote-plasma-assisted CVD

〇TRUYEN XUAN NGUYEN^1,2, Noriyuki Taoka², Akio Ohta¹, Taishi Yamamoto^1,2, Hisashi Yamada², Tokio Takahashi², Mitsuhisa Ikeda¹, Katsunori Makihara¹, Mitsuaki Shimizu², Seiichi Miyazaki¹ (1.Nagoya Univ., 2.AIST GaN-OIL)