Akira Sasaki

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:15 PM - 4:15 PM 318 (318)

Oral presentation
| CS Code-sharing session
| CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[15p-318-1~11] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

4:00 PM - 4:15 PM

[15p-318-11] Particle emission from the target of EUV source through laser ablation

〇Akira Sasaki¹, Atsushi Sunahara², Katsunobu Nishihara³, Takeshi Nishikawa⁴ (1.QST, 2.ILT, 3.ILE Osaka Univ., 4.Okayama Univ.)