Mikio Noda

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:15 PM - 6:15 PM 412 (412)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[15p-412-1~18] 6.2 Carbon-based thin films

4:15 PM - 4:30 PM

[15p-412-12] Formation of DLC and BN films by Pulsed Discharge Plasma CVD

〇Mikio Noda¹, Isao Horibe² (1.Pulse Plasma Tech., 2.Lightec Lab.)