Toru Harigai

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:15 PM - 6:15 PM 412 (412)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[15p-412-1~18] 6.2 Carbon-based thin films

1:45 PM - 2:00 PM

△ [15p-412-3] Formation and Characterization of Hydrogen-Free and Hydrogenated DLC Films

〇Toru Harigai¹, Takahiro Imai¹, Yushi Iijima¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Masao Kamiya², Satoru Kaneko³, Shinsuke Kunitsugu⁴, Masahito Niibe⁵, Kazuhiro Kanda⁵ (1.Toyohashi Univ. Technol., 2.Itoh Opt. Ind. Co., Ltd., 3.Kanagawa Ind. Technol. Cent., 4.Ind. Technol. Cent. of Okayama, 5.Univ. of Hyogo)

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