Shinji Yudate

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:15 PM - 6:15 PM 412 (412)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[15p-412-1~18] 6.2 Carbon-based thin films

2:00 PM - 2:15 PM

[15p-412-4] Preparation of DLC Films using Microwave Plasma CVD in Open-air

〇Shinji Yudate¹, Nori Hayashi¹, Jun Natsui¹, Keichiroh Yanagida¹, Kazuya Yamamoto¹, Hideki Motomura¹, Hidetsugu Yagi¹ (1.Ehime Univ.)