Hirotsugu Sugiura

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:15 PM - 6:15 PM 412 (412)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[15p-412-1~18] 6.2 Carbon-based thin films

3:15 PM - 3:30 PM

△ [15p-412-8] The effect of gas residence time on electronic properties of amorphous carbon films grown by radical injection plasma enhanced chemical vapor deposition

〇Hirotsugu Sugiura¹, Lingyun Jia¹, Hiroki Kondo¹, Kenji Ishikawa¹, Keigo Takeda¹, Makoto Sekine¹, Masaru Hori² (1.Nagoya Univ. Eng., 2.Nagoya Univ. Inst. of Innovation for Future Society)

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