Masaru Nakagawa

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:30 PM - 6:00 PM 512 (512)

Symposium (Oral)
| Symposium
| Progress and outlook of nanoimprint technology

[15p-512-1~9] Progress and outlook of nanoimprint technology

2:15 PM - 2:45 PM

[15p-512-2] Approach to single-digit-nanometer patterning in UV nanoimprinting by surface molecular science

Shunya Ito¹, 〇Masaru Nakagawa¹ (1.IMRAM, Tohoku Univ.)