Masaaki Yasuda

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:30 PM - 6:00 PM 512 (512)

Symposium (Oral)
| Symposium
| Progress and outlook of nanoimprint technology

[15p-512-1~9] Progress and outlook of nanoimprint technology

2:45 PM - 3:15 PM

[15p-512-3] Computational Study of Resist Molecular Behavior in Nanoimprint Lithography

〇Masaaki Yasuda¹, Yoshihiko Hirai¹ (1.Osaka Pref. Univ.)