Masanobu Tanaka

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 4:00 PM - 6:00 PM P11 (BP)

Poster presentation
| 7 Beam Technology and Nanofabrication
| 7 Beam Technology and Nanofabrication（Poster）

[15p-P11-1~11] 7 Beam Technology and Nanofabrication（Poster）

7のコードシェアセッションあり

4:00 PM - 6:00 PM

[15p-P11-3] Development of bucket type RF ion sources for large area ion beam milling

〇Masanobu Tanaka¹ (1.Kumamoto Univ.)