Tomoki Oku

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 4:00 PM - 6:00 PM P14 (BP)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[15p-P14-1~11] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

4:00 PM - 6:00 PM

[15p-P14-1] Surface oxidation process of silicon-rich SiN films under humid environment

〇Tomoki Oku¹, Toshihiko Shiga¹, Masahiro Totsuka¹, Shinichi Takagi¹ (1.Mitsubishi Electric)