Kyohei Degura

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 4:00 PM - 6:00 PM P15 (BP)

Poster presentation
| 13 Semiconductors
| 13.5 Semiconductor devices and related technologies

[15p-P15-1~17] 13.5 Semiconductor devices and related technologies

6.1と13.3と13.5のコードシェアセッションあり

4:00 PM - 6:00 PM

[15p-P15-16] S/D electrodes for SiGe HEMT formed by Sputter Epitaxy Method

〇Kyohei Degura¹, Akira Motohashi¹, Katsumi Okubo¹, Nobumitsu Hirose², Akifumi Kasamatsu², Toshiaki Matsui², Takahiro Tsukamoto¹, Yoshiyuki Suda¹ (1.Tokyo Univ. of Agric. & Technol., 2.National Inst. of Information and Communications Technol.)

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