Kazuki Yuzurihara

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:30 PM - 3:30 PM P3 (BP)

Poster presentation
| 6 Thin Films and Surfaces
| 6.3 Oxide electronics

[15p-P3-1~26] 6.3 Oxide electronics

1:30 PM - 3:30 PM

[15p-P3-16] Low temperature growth of Al-doped ZnO thin films by substrate biased sputtering

〇(M1)Kazuki Yuzurihara¹, Kenta Sato¹, Hiroaki Hoshino¹, Kunio Okimura¹, Yoshio Yasumori² (1.Tokai Univ., 2.Tokai Univ. Ctr. Educ. Res. Dev.)