Yongxun Liu

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 9:00 AM - 12:15 PM E206 (E206)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[16a-E206-1~13] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

11:30 AM - 11:45 AM

[16a-E206-11] Minimal SOI-CMOS Fabrication Using Soild Source Diffusion by Spin on Dopants

〇Yongxun Liu¹, Kazuhiro Koga^1,2, Sommawan Khumpuang^1,2, Masayoshi Ngao¹, Takashi Matsukawa¹, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)