Fumito Imura

→ Search for Fumito Imura in Google Scholar

Speaker, Author, Co-Author

Thu. Mar 16, 2017 9:00 AM - 12:15 PM E206 (E206)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[16a-E206-1~13] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

12:00 PM - 12:15 PM

[16a-E206-13] Electrical Characteristics of Half-Inch Sized Package Fabricated by Minimal Fab

〇Fumito Imura^1,2, Takuya Koga², Michihiro Inoue¹, Arami Saruwatari^1,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.Minimal Fab)