Toshiyuki Isshiki

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 9:30 AM - 11:30 AM P5 (BP)

Poster presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[16a-P5-1~15] 15.6 Group IV Compound Semiconductors (SiC)

9:30 AM - 11:30 AM

[16a-P5-2] Detection of damaged layers induced during CMP process and linkage analyses of the structure of the damaged layer by MPJ, SEM, AFM, and FIB-STEM

〇Toshiyuki Isshiki¹, Takahiro Sato², Masaki Hasegawa², Atsushi Miyaki², Masato Iyoki², Takehiro Yamaoka², Katsunori Onuki², Kobayashi Kenji² (1.Kyoto Inst. Tech., 2.Hitachi Hightech.)

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