Kiichi Kobayakawa

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 9:30 AM - 11:30 AM P5 (BP)

Poster presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[16a-P5-1~15] 15.6 Group IV Compound Semiconductors (SiC)

9:30 AM - 11:30 AM

[16a-P5-7] Effects of surface etching with CF₄on 4H-SiC MOS Capacitors

〇(B)Kiichi Kobayakawa¹, Kousuke Muraoka¹, Hiroshi Sezaki^1,2, Seiji Ishikawa^2,1, Tomonori Maeda^2,1, Takamaro Kikkawa¹, Shin-Ichiro Kuroki¹ (1.Hiroshima Univ. RNBS, 2.Phenitec)