Takeaki Shinohara

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 1:15 PM - 6:30 PM 412 (412)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices and related technologies

[16p-412-1~20] 13.5 Semiconductor devices and related technologies

6.1と13.3と13.5のコードシェアセッションあり

6:15 PM - 6:30 PM

[16p-412-20] Hafnium disulfide film using sulfurization from hafnium nitride for nMOSFET

〇Takeaki Shinohara¹, Iriya Muneta¹, Kuniyuki Kakushima¹, Kazuo Tsutsui¹, HItoshi Wakabayashi¹ (1.Tokyo Tech.)