Koji Kita

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 1:45 PM - 6:30 PM 502 (502)

Symposium (Oral)
| Symposium
| Process technology for advanced power semiconductor devices

[16p-502-1~10] Process technology for advanced power semiconductor devices

2:45 PM - 3:15 PM

[16p-502-3] Design of Thermal Oxidation Processes for the Control of MOS Interface Properties on 4H-SiC

〇Koji Kita¹ (1.Univ. of Tokyo)