Tohru Nakamura

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 1:45 PM - 6:30 PM 502 (502)

Symposium (Oral)
| Symposium
| Process technology for advanced power semiconductor devices

[16p-502-1~10] Process technology for advanced power semiconductor devices

4:30 PM - 5:00 PM

[16p-502-7] Ion Implantation into GaN and Its Application to Power Devices

〇Tohru Nakamura^1,2, Tomoyoshi Mishima¹, Kiyoji Ikeda¹, Michitaka Yoshino¹ (1.Hosei Univ, 2.Nagoya Univ)