Takahiro Suzuki

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 1:45 PM - 6:30 PM E206 (E206)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[16p-E206-1~17] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

4:15 PM - 4:30 PM

△ [16p-E206-10] Evaluation of Anisotropic Biaxial Stress in Trench Structure by Raman Spectroscopy

〇Takahiro Suzuki¹, Ryo Yokogawa¹, Kohei Oasa², Tatsuya Nishiwaki², Takeshi Hamamoto², Atsushi Ogura¹ (1.Meiji Univ., 2.Toshiba Corp.)