Kenji Koshiishi

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 1:45 PM - 6:30 PM E206 (E206)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[16p-E206-1~17] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

5:00 PM - 5:15 PM

[16p-E206-12] Buckling analysis of fine pattern structures of a semiconductor device using molecular dynamics and finite element methods

〇Kenji Koshiishi¹, Reiko Saito¹, Sachiyo Ito¹, Yohei Tamura², Shunsuke Imaizumi², So Takamoto², Satosh Izumi² (1.TOSHIBA, 2.Tokyo Univ.)