Kazuhiro Kanda

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 1:30 PM - 3:30 PM P3 (BP)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[16p-P3-1~23] 6.2 Carbon-based thin films

1:30 PM - 3:30 PM

[16p-P3-5] Variation in film properties of fluorine containing DLC film by exposure to soft X-rays

Hiroki Takamatsu¹, 〇Kazuhiro Kanda¹, Eri Miura², Hiroki Akasaka³, Akihiro Saiga⁴, Koji Tamada⁴, Masahito Tagawa⁵, Kumiko Yokota⁵, Yuichi Furuyama⁶ (1.LASTI, Univ. Hyogo, 2.School of Eng., Univ. Hyogo, 3.School of Eng., Tokyo Inst. Tech., 4.Tokyo National College Tech., 5.School of Eng., Kobe Univ., 6.School of Maritime Sci., Kobe Univ.)

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