Tatsuhiko Nishimura

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 9:00 AM - 12:15 PM 301 (301)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[17a-301-1~12] 15.6 Group IV Compound Semiconductors (SiC)

9:00 AM - 9:15 AM

[17a-301-1] Characterization of 4H-SiC Wafer and SiO2/SiC Using a Laser Terahertz Emission Microscope

Hidetoshi Nakanishi¹, 〇Tatsuhiko Nishimura¹, Katsuya Fujita¹, Fujikazu Kitamura¹, Minoru Mizubata¹, Iwao Kawayama², Masayoshi Tonouchi² (1.SCREEN, 2.ILE Osaka Univ.)

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