Kosuke Takenaka

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:30 PM - 3:30 PM P1 (BP)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics（Poster）

[14p-P1-1~25] 8 Plasma Electronics（Poster）

1:30 PM - 3:30 PM

[14p-P1-25] Deposition of Aluminum Nitride Thin Films with Plasma Enhanced Reactive DC Magnetron Sputter Deposition

〇Kosuke Takenaka¹, Yoshikatsu Satake¹, Giichiro Uchida¹, Yuichi Setsuhara¹ (1.Osaka Univ.)

Fri. Mar 17, 2017 9:00 AM - 1:00 PM 315 (315)

Oral presentation
| 8 Plasma Electronics
| 8.3 Plasma deposition of thin film and surface treatment

[17a-315-1~15] 8.3 Plasma deposition of thin film and surface treatment

11:30 AM - 11:45 AM

[17a-315-10] Formation of High-Mobility IGZO Thin Film Transistors with Plasma Enhanced Reactive Sputter Deposition

Yuichi Setsuhara¹, Masashi Endo¹, 〇Kosuke Takenaka¹, Giichiro Uchida¹, Akinori Ebe² (1.Osaka Univ., 2.EMD Corp.)