Masato Fukuda

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 9:00 AM - 1:00 PM 315 (315)

Oral presentation
| 8 Plasma Electronics
| 8.3 Plasma deposition of thin film and surface treatment

[17a-315-1~15] 8.3 Plasma deposition of thin film and surface treatment

12:15 PM - 12:30 PM

[17a-315-13] Magnetic Field Effects on Charged Particle Dynamics in Arc Ion Plating Device

〇(M2)Masato Fukuda¹, Hideyuki Usui¹, Yohei Miyake¹, Kenji Yamamoto², Akira Narai², Masao Mizuno², Hiroaki Nii² (1.Kobe Univ., 2.Kobe Steel Ltd.)