Hiroaki Suzuki

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 9:00 AM - 1:00 PM 315 (315)

Oral presentation
| 8 Plasma Electronics
| 8.3 Plasma deposition of thin film and surface treatment

[17a-315-1~15] 8.3 Plasma deposition of thin film and surface treatment

10:15 AM - 10:30 AM

△ [17a-315-6] Spectroscopic Investigations in Water Plasma Ashing Process for Polymer Films with Different Chemical Structures

〇(M1C)Hiroaki Suzuki¹, Takuya Kitano¹, Arufua Shiota¹, Tatsuo Ishijima¹, Yasunori Tanaka¹, Yoshihiko Uesugi¹, Takashi Nishiyama², Hideo Horibe² (1.Kanazawa Univ., 2.Osaka City Univ.)

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