masaharu shimabayashi

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 9:00 AM - 1:00 PM 315 (315)

Oral presentation
| 8 Plasma Electronics
| 8.3 Plasma deposition of thin film and surface treatment

[17a-315-1~15] 8.3 Plasma deposition of thin film and surface treatment

10:30 AM - 10:45 AM

△ [17a-315-7] Relationship between density of atomic nitrogen and temperature of discharge tube in a remote nitrogen plasma source

〇masaharu shimabayashi¹, kazuaki kurihara², koichi sasaki¹ (1.Hokkaido Univ., 2.Toshiba/Imec)