Shinichi Morohashi

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 9:00 AM - 1:00 PM 315 (315)

Oral presentation
| 8 Plasma Electronics
| 8.3 Plasma deposition of thin film and surface treatment

[17a-315-1~15] 8.3 Plasma deposition of thin film and surface treatment

11:00 AM - 11:15 AM

[17a-315-8] Composition dependence of ITO thin film fabricating by hybrid facing-target sputtering

〇Shinichi Morohashi^1,2, Tsukasa Tanimoto¹, Keisuke Tsujita¹ (1.Yamaguchi Univ., 2.AIST)