Yikang Liu

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 9:00 AM - 12:30 PM 503 (503)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[17a-503-1~13] 15.4 III-V-group nitride crystals

10:00 AM - 10:15 AM

[17a-503-5] Annealing of sputtering AlN film and homoepitaxy on the AlN by HVPE

〇Yikang Liu¹, Hideto Miyake^1,2, Kazumasa Hiramatsu¹, Motoaki Iwaya³, Isamu Akazaki³ (1.Mie Univ., 2.Reg. Inn.,Mie Univ., 3.Meijo Univ.)