Koji Kita

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 1:45 PM - 5:00 PM 301 (301)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[17p-301-1~11] 15.6 Group IV Compound Semiconductors (SiC)

2:15 PM - 2:30 PM

[17p-301-2] Impact of wet-oxidation condition on interface state density and bias stress instability of SiO₂/4H-SiC m-face interface formed by dry- and wet-oxidation

Kohei Kuroyama¹, Hirohisa Hirai¹, Kensaku Yamamoto², Mariko Hayashi², Norikazu Hosokawa², 〇Koji Kita¹ (1.Univ. of Tokyo, 2.DENSO CORP.)