Ryota Sakuta

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 1:45 PM - 5:00 PM 301 (301)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[17p-301-1~11] 15.6 Group IV Compound Semiconductors (SiC)

3:45 PM - 4:00 PM

△ [17p-301-7] Enhanced oxynitridation at SiC/SiO₂ interface by using rare earth element

〇Ryota Sakuta¹, Hirohisa Hirai¹, Koji Kita¹ (1.The Univ. of Tokyo)