Taisei Suzuki

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 1:00 PM - 5:00 PM 304 (304)

Oral presentation
| CS Code-sharing session
| CS.2 6.1/13.3/13.5 Code-sharing Session

[17p-304-1~15] CS.2 6.1/13.3/13.5 Code-sharing Session

1:00 PM - 1:15 PM

△ [17p-304-1] Growth of epitaxial Y₂O₃-doped HfO₂ thin films by Sputtering method and their characterization

〇(M1)Taisei Suzuki¹, Takanori Mimura², Takao Shimizu³, Hiroshi Uchida⁴, Hiroshi Funakubo^1,2,3 (1.Tokyo Tech. SMCT, 2.Tokyo Tech. IGS, 3.Tokyo Tech. MECS, 4.Sophia Univ. FST)