Takashi Onaya

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 1:00 PM - 5:00 PM 304 (304)

Oral presentation
| CS Code-sharing session
| CS.2 6.1/13.3/13.5 Code-sharing Session

[17p-304-1~15] CS.2 6.1/13.3/13.5 Code-sharing Session

2:30 PM - 2:45 PM

△ [17p-304-7] Improvement of ferroelectricity of Hf_xZr_1-xO₂ film using ALD-ZrO₂ seed layer

〇(M1)Takashi Onaya^1,2, Toshihide Nabatame^2,3, Kazunori Kurishima^1,2, Naomi Sawamoto¹, Akihiko Ohi², Naoki Ikeda², Toyohiro Chikyow², Atsushi Ogura¹ (1.Meiji Univ., 2.NIMS WPI-MANA, 3.CREST, JST)