Satoru Yoshimura

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 12:45 PM - 5:00 PM 313 (313)

Oral presentation
| 8 Plasma Electronics
| 8.7 Plasma phenomena, emerging area of plasmas and their new applications

[17p-313-1~16] 8.7 Plasma phenomena, emerging area of plasmas and their new applications

12:45 PM - 1:00 PM

[17p-313-1] Low-Energy Mass-Selected Ion Beam Production of Fragments Produced from Hexamethyldisilane for SiC Film Formation

〇Satoru Yoshimura¹, Satoshi Sugimoto¹, Masato Kiuchi^1,2 (1.Osaka Univ., 2.AIST)