Masaya Hotta

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 2:00 PM - 5:00 PM 315 (315)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and control

[17p-315-1~12] 8.1 Plasma production and control

4:30 PM - 4:45 PM

△ [17p-315-11] Density Profile Control of Microwave Plasma Generated by Cylindrical Cavity

〇(M1)Masaya Hotta¹, Yuichi Hasegawa¹, Daisuke Ogawa¹, Keiji Nakamura¹, Soonam Park², Dima Lubomirsky², Satoru Kobayashi², Hideo Sugai³ (1.Chubu Univ., 2.Applied Materials, 3.NISRI)

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