Masatoshi Itoh

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 1:30 PM - 3:30 PM P3 (BP)

Poster presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[17p-P3-1~22] 15.4 III-V-group nitride crystals

1:30 PM - 3:30 PM

[17p-P3-10] Growth of AlN films by DC reactive sputtering method using high-vacuum sputtering apparatus

〇Masatoshi Itoh¹, Shigeru Saito¹ (1.Tokyo Univ. of Sci.)