[14a-318-1~9] 15.5 Group IV crystals and alloys

[14a-318-9] [JSAP Young Scientist Award Speech] Heavy doping for poly-Ge_1-xSn_x using pulsed laser annealing in water

〇Kouta Takahashi^1,2, Masashi Kurosawa^1,3, Hiroshi Ikenoue⁴, Mitsuo Sakashita¹, Osamu Nakatsuka¹, Shigeaki Zaima^1,5 (1.Grad. Sch. of Eng., Nagoya Univ., 2.JSPS Research Fellow, 3.PRESTO, JST, 4.Dept. of Gigaphoton Next GLP, Grad. Sch. of ISEE, Kyushu Univ., 5.IMaSS, Nagoya Univ.)

Keywords:doping, GeSn