The 64th JSAP Spring Meeting, 2017

Presentation information

Print

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[14a-503-1~12] 15.4 III-V-group nitride crystals

Tue. Mar 14, 2017 9:00 AM - 12:15 PM 503 (503)

Tsutomu Araki(Ritsumeikan Univ.), Jitsuo Ohta(Univ. of Tokyo)

9:00 AM - 9:15 AM

[14a-503-1] Growth of hBN films on AlN layers with metal catalysts by sputtering

〇Jitsuo Ohta1,2, Hiroshi Fujioka1,3 (1.IIS, Univ. of Tokyo, 2.JST-PRESTO, 3.JST-ACCEL)

Keywords:hBN, AlN, metal catalyst