[14p-213-1~14] 6.4 Thin films and New materials

[14p-213-4] RHEED and ARPES Studies of MoS₂ Film Formed by Sputtering Method

〇Masatoshi Yoneda¹, Takeda Sakura¹, Taguchi Munetaka¹, Matsuda Hiroyuki¹, Ohashi Takumi², Shimizu Junichi², Ang Artoni Kevin¹, Hashimoto Yusuke¹, Fukami Shun¹, Tanaka Ikko¹, Okamoto Takashi¹, Ebato Tatsuya¹, Daimon Hiroshi¹, Wakabayashi Hitoshi², Kinoshita Toyohiko³ (1.Nara Inst., 2.Tokyo Tech., 3.JASRI)

Keywords:photoemission spectroscopy, molybdenum disulfide, sputter deposition