[14p-213-1~14] 6.4 Thin films and New materials

[14p-213-8] Preferred orientation and surface structures of Pt films grown on SrTiO₃(100)

〇Masahiro Kasai¹, Hideyuki Dohi¹ (1.Kyushu univ.)

Keywords:Catalyst, Pt films, Eptaxial

We fabricated Pt films on SrTiO₃(100) by dc-magnetron sputtering method, and investigated preferred orientation, surface structure and electrochemical property. A film grown at 400°C showed two-dimensional polycrystalline features of Pt(111). Films grown at 600 and 700°C exhibited preferred orientation with mixed planes of (100), (111) and (110). By increasing growth temperature to 750°C the film indicated dominantly preferred orientation of (100). The films grown at 600 and 700°C were composed of island with roughness of several tens nm. Observation by reflection high-energy reflection revealed that the islands grow in epitaxial relationship of [010]Pt // [011]SrTiO₃. The relationship changed to [010]Pt // [010]SrTiO₃ at growth temperature of 750°C.