[14p-318-1~9] 15.5 Group IV crystals and alloys

△ [14p-318-3] Epitaxial growth of single crystalline silicon-germanium thin film on silicon substrates by solid phase crystallization (Ⅱ)

〇(M2)Alaa Hassan Hamdoh¹, Tetsuya Kaneko¹, Masao Isomura¹ (1.Tokai Univ.)

Keywords:Epitaxial growth, SiGe, Si substrate