The 64th JSAP Spring Meeting, 2017

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[14p-412-1~18] 6.2 Carbon-based thin films

Tue. Mar 14, 2017 1:15 PM - 6:15 PM 412 (412)

Hiroshi Kawarada(Waseda Univ.), Hitoshi Umezawa(AIST), Mariko Suzuki(Toshiba)

4:15 PM - 4:30 PM

[14p-412-12] Fabrication of B-doped diamond FET using ferroelectric gate insulator (2)

Ryota Karaya1, Ikki Baba1, Ryo Yoshida1, Syunsuke Syoji1, Takashi Nakajima2, Tsubasa Matsumoto1, Norio Tokuda1, 〇Takeshi Kawae1 (1.Kanazawa University, 2.Tokyo Univ. of Sci.)

Keywords:B-doped Diamond, Ferroelectric gate, FET