[14p-412-1~18] 6.2 Carbon-based thin films

[14p-412-5] Appearance of surface conductive layer by annealing of an acid-treated diamond (111)

〇Shozo Kono¹, Yuya Hayashi², Atsushi Hiraiwa¹, Sung-Gi Ri³, Hidefumi Inaba², Hiroshi Kawarada^1,2 (1.RONL, Waseda Univ., 2.Fac. Sci. Eng., Waseda Univ., 3.Comet Inc.)

Keywords:diamond, surface conductive layer

A peculiar property of surface conductive layer on diamond (111) surface as compared to that of (001) surface was first reported by Ri et al. in 2006. Namely, a surface conductive layer (SCL) re-appeared when an acid-treated (i.e., the surface covered with oxygen) diamond (111) sample was simply annealed in vacuum or in Ar-gas atmosphere and then exposed to air. This kind of SCL re-appearance does not happen for (001) surface. Re-appearance of SCL of (111) surface was then studied by XPS and TPYS to find a negative-electron-affinity nature of the SCL. Since this study [2], no other related studies were reported so far to the authors’ knowledge. In the present study, we reconfirmed the re-appearance of SCL on (111) surface and found the difference in the conditions in acid-treated surfaces between (111) and (001) by XPS.