The 64th JSAP Spring Meeting, 2017

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[14p-412-1~18] 6.2 Carbon-based thin films

Tue. Mar 14, 2017 1:15 PM - 6:15 PM 412 (412)

Hiroshi Kawarada(Waseda Univ.), Hitoshi Umezawa(AIST), Mariko Suzuki(Toshiba)

2:00 PM - 2:15 PM

[14p-412-4] Enhancement of Breakdown Voltage in H-terminated Diamond Field-Effect Transistors with Field Plate Structure

〇(M1)Takuya Okamura1, Shigeru Kishimoto1, Yutaka Ohno1,2 (1.Grad. Sch. of Eng., Nagoya Univ., 2.Inst. of Materials and Systems for Sustainability, Nagoya Univ.)

Keywords:diamond, field plate, H-terminated