[14p-423-1~14] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

△ [14p-423-14] Fabrication of 3D Periodic Structures using ZnO Solution with Non-Vacuum Process

〇(D)Shinji Araki^1,2, Yasuaki Ishikawa¹, Xudongfang Wang¹, Mutsunori Uenuma¹, Donghwi Cho³, Seokwoo Jeon³, Yukiharu Uraoka¹ (1.NAIST, 2.JSPS Research Fellow, 3.KAIST)

Keywords:ZnO, three-dimensional, periodic structure

We fabricated a 3D structure of photopolymer by using a laser process with a phase shift mask, which is called proximity filed nanopatterning process. This process can easily change the structural sizes of the 3D structure of photopolymer with altering the design of the mask to be used. The resultant structure was used as a template to obtain a ZnO 3D inverse structure through infiltrating ZnO solution. The proposed method has two different baking processes: pre-baking and post-baking. We found that the pre-baking contributes to the high-density filling of ZnO solution into the template and building a solid foundation of a ZnO inverse structure. Then, the post-baking which has higher temperature than the pre-baking was conducted to pyrolyze ZnO precursor and remove the template completely without critical structural defects in the resultant ZnO 3D inverse structure. Energy dispersive X-ray analysis (EDX) was performed for ZnO 3D structures in order to confirm whether carbon derived from template and organic solvent in ZnO solution were removed or not. The results showed that the amount of carbon (C Kα) in the 3D template, which was filled with ZnO precursor, significantly decreased after the post-baking. We also evaluated the sizes of obtained ZnO 3D structure and its shrinkage factor compared with the template.