[14p-514-1~8] 1.6 Ultrasonics

[14p-514-7] Adsorption Desorption Measurement of Stainless Steel Gas Tubes Using Ball Surface Acoustic Wave Trace Moisture Analyzer

〇Toshihiro Tsuji¹, Shingo Akao², Toru Oizumi², Hideyuki Fukushi², Nobuo Takeda², Yusuke Tsukahara², Kazushi Yamanaka² (1.Tohoku Univ., 2.Ball Wave Inc.)

Keywords:SAW sensor, trace moisture analyzer, stainless steel tube

Ball SAW trace moisture analyzer has a feature of very short response time, compared with previous methods. This feature is useful for the evaluation of adsorption desorption characteristics of stainless steel tubing. In this presentation, we report a result of the evaluation of 100mm tubing samples with inner diameter of 4.35mm, where inner surface treatments were bright annealing, electro polishing, and electro chemical buffing. As a result, it was found that the inner surface treatments significantly influenced the adsorption desorption characteristics of tubing system only by 100mm.