[14p-514-1~8] 1.6 Ultrasonics

[14p-514-8] High-Coupling Leaky SAWs on LiTaO₃ Thin Plate Bonded to Quartz Substrate

〇Shoji Kakio¹, Masashi Gomi¹, Junki Hayashi¹, Haruka Suzaki², Toshifumi Yonai³, Kazuhito Kishida³, Jun Mizuno² (1.Univ. of Yamanashi, 2.Waseda Univ., 3.Japan Steel Works, Ltd.)

Keywords:leaky SAW, bonded structure, quartz

The propagation properties of Leaky SAW (LSAW) and longitudinal-type LSAW (LLSAWs) on a LiTaO₃ (LT) thin plate bonded to an AT-cut quartz substrate with a high phase velocity were investigated. For 36°YX- LT/ AT-X quartz with a thin-plate thickness h of 0.44 λ (λ: wavelength) and X31°Y-LT/ AT-60°X quartz with h of 0.25 λ, the values of K² for an LSAW and LLSAW were experimentally found to increase from 5.9 and 3.5% for the single substrate to 9.6 and 8.5% for the thin-plate bonded structure, respectively. In addition, it was found that the resonance properties of LSAW and LLSAW were improved for the bonded structure.