[14p-F201-1~14] 15.7 Crystal evaluation, impurities and crystal defects

[14p-F201-14] Sensitivity and detection limit of carbon concentration measurement in silicon crystal
(2) Incorrect Detection limit

〇Naohisa Inoue¹ (1.Research integrity study Group)

Keywords:silicon crystal, carbon concentration measurement, infrared absorption

“Detection limit” of carbon concentration by infrared absorption spectroscopy is incorrectly used by the researchers of other techniques. It is around 1E+15cm-3 which is far from the research reorts down to 1E+14cm-3. “Detection limit” of SIMS and CPAA is also stated.