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[14p-F206-11] Influence of dimensions on Seebeck coefficient in nanostructured SOI layer
Keywords:Seebeck coefficient
We fabricated Si nanowire array on B-doped SOI substrate with widthes of 100 nm-5 µm. It was found that their Seebeck coefficient increases with increasing the wire width in contrast to our expectation. The physical reason is now under consideration.